• 姓名: 毛海央
  • 性别: 女
  • 职称: 副研究员
  • 职务: 
  • 学历: 博士
  • 电话: 
  • 传真: 
  • 电子邮件: maohaiyang@ime.ac.cn
  • 所属部门: 智能感知研发中心
  • 通讯地址: 北京市朝阳区北土城西路3号

    简  历:

  • 教育背景

    2007.09-2011.07,北京大学,信息科学与技术学院微电子学系,研究生/博士学位 

    2004.09-2007.07,中北大学,电子科学与技术系,研究生/硕士学位 

    2000.09-2004.07,中北大学,电子工程系,本科/学士学位 

    工作简历 

    2013.12-至今,      中国科学院,澳门皇家赌场娱乐,副研究员;

    2011.07-2013.12,中国科学院,澳门皇家赌场娱乐,助理研究员;

                                   中国科学院,江苏物联网研究发展中心,助理研究员;

    2008.09-2008.11,美国加州大学戴维斯分校,访问学者

    社会任职:

    研究方向:

  • 微纳电系统(MEMS/NEMS)技术,CMOS-MEMS工艺平台,红外传感器,微流控器件,生化传感器。

    承担科研项目情况:

  • 1. 广东省重点研发计划,课题负责人,2019-2021,600万;

    2. 企业横向课题,负责人,2019-2020,200万;

    3. 重点研发计划课题,课题负责人,2019.6-2022.6,257万;

    4. 国家重大专项XX项目,课题负责人,2019-2021,200万;

    5. 中国科学院青促会项目,2018-2021,80万;

    6. 国家自然科学基金面上项目,负责人,2018-2021,62万;

    7. 国防科技创新项目,课题负责人,2017-2020,130万;

    8. 担国家自然科学基金青年基金,负责人,2015-2017,30万;

    9. 河南省科技开放合作项目,负责人,2015-2016,30万。

    代表论著:

  • 1.        Ruirui Li, Haiyang Mao*, Menghua Zhu, Yudong Yang, Jijun Xiong*, and Weibing Wang,“Facile preparation of Broadband Absorbers Based on Patternable Candle Soot for Applications of Optical Sensors,” Sens. Actuators A: Phys., 2018, 285, 111-117.

    2.        Yudong Yang, Haiyang Mao*, Jijun Xiong*, Yucong Jia, Ruirui Li, and Weibing Wang, "Optical Features of Nanowire Forests Prepared by A Plasma Repolymerization Technique," IEEE Transactions on Nanotechnology, 2018, 17(4), 719-722.

    3.        Haiyang Mao*, Chengjun Huang, Wengang Wu, Mei Xue, Yudong Yang, Jijun Xiong, Anjie Ming and Weibing Wang, “Wafer-level Fabrication of Nanocone Forests by Plasma Repolymerization Technique for Surface-enhanced Raman Scattering Devices,” Applied Surface Science, 2017,396,1085-1091.

    4.        Wengang Wu, Haiyang Mao, Xiang Han, Jun Xu, and Weibing Wang, “Fabrication and characterization of SiO2/Si heterogeneous nanopillar arrays,” Nanotechnology, 2016, 27, 305301(9pp).

    5.        Haiyang Mao, Wengang Wu, Didi She, Gongchen Sun, Pengpeng Lv, and Jun Xu, “Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by Oxygen-Plasma-Stripping-of-Photoresist Technique,” Small , 2014, 10(1), 127-134

    6.        Mao H*, Yuanjing Chen, Yi Ou, Wen Ou, Jijun Xiong, Chunjuan You, Qiulin Tan, and Dapeng Chen, “Fabrication of Nanopillar Forests with High Infrared Absorptance Based on Rough Poly-Si and Spacer Technology,” J. Micromech. Microeng., 23 (2013), 095033.

    7.        Yuanjing Chen, Haiyang Mao*, Qiulin Tan, Chenyang Xue, Wen Ou,Jin Liu, Dapeng Chen, “Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology,” AIP Advances, 4, 031328, 2014.

    8.        Haiyang Mao, Di Wu, Wengang Wu, Jun Xu and Yilong Hao, “Fabrication of Diversiform Nanostructure Forests Based on Residue Nanomasks Synthesized by Oxygen Plasma Removal of Photoresist,” Nanotechnology, 2009, 20, 445304.

    9.        Haiyang Mao, Wengang Wu, Yulong Zhang, Ge Zhai and Jun Xu, “Fabrication of High-Compact Nanowires Using Alternating Photoresist Ashing and Spacer Technology,” Journal of Micromechanics and Microengineering, 20, 085029, 2010.

    10.        Haiyang Mao, Yulong Zhang, Wengang Wu, Gongchen Sun, and Jun Xu, “Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography,” Journal of Micromechanics and Microengineering, 21, 085004, 2011.

    11.        BAO AiDa , MAO HaiYang*, XIONG JiJun, CHEN ZhuoJie, OU Wen& CHEN DaPeng, “Nanopillar-forest based surface-enhanced Raman scattering substrates,” Science China: Information Sciences, 57, 2014, 082407:1–082407:8.

    12.        Ruirui Li, Bo Gui, Haiyang Mao*, Yudong Yang, Hao Yang, Jijun Xiong, Weibing Wang, "A Crystal-clear SERS-droplet with Evenly Distributed 3D hot-spots," The 32nd IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2019), Seoul, Korea, 27-31 January 2019, pp. 392-395

    13.        Ruirui Li, Haiyang Mao*, Guidong Chen, Jijun Xiong*, and Weibing Wang, "A Highly Sensitive SERS Device Based on A PDMS-CVD Prepared Substrate," IEEE SENSORS 2018, New Delhi, India, India, 28-31 Oct. 2018

    14.        Haiyang Mao*, Ruirui Li, Chengjun Huang, Yucong Jia, Weibing Wang, Anjie Ming, and Jijun Xiong “A highly SERS-active and flexible droplet based on carbon-metal composite nanoparticles,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 1344-1347.

    15.        Ruirui Li, Haiyang Mao*,Yudong Yang, Yuncong Jia, Huiqiong Xue, Jijun Xiong, and Weibing Wang, “Candle soot with broadband high absorptance for applications of infrared sensors,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 882-885.

    16.        Yudong Yang, Haiyang Mao*, Yuncong Jia, Huiqiong Xue, Jijun Xiong, Weibing Wang and Binbin Jiao, “Hybrid nanopillar forests with broadband high absorptance,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 1332-1335.

    17.        Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong, “Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique,” The 26th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2016), Shanghai, China, January 24-28, 2016, pp.1185-1188.

    18.        L.C. Tang, H.Y. Mao*, Y. Wang, W. Ou, W.G. Wu, J. J. Xiong, Q. L. Tan, “Fabrication of Nanowires from Polyimide for Transparent SERS Devices,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 15) , Anchorage, Alaska, USA, June 21-25, 2015, pp.1397-1400.

    19.        C. Lei, L.C. Tang, H.Y. Mao*, Y. Wang, J.J. Xiong , W. Ou, W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Nanofiber Forests as A Humidity-Sensitive Material,” The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015), Estoril, Portugal, January 18-22,2015, pp.857-860.

    20.        Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong , W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching,” The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015), Estoril, Portugal, January 18-22,2015, pp.320-323.

    21.        H.Y. Mao*, C. Lei, Y. J. Chen, Z. J. Chen, W. Ou, W. G. Wu, A. J. Ming, and D. P. Chen, “Nanofiber Forests with High Infrared Absorptance,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2014), San Francisco, USA, January 26-30,2014, pp.644-647.

    22.        H.Y. Mao, P.P. Lv and W.G. Wu, “Microfluidic Surface-enhanced Raman Scattering Sensors for Online Monitoring Trace Chemical Mixing and Reaction,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 11). Bejing, China, June 5-9, 2011, pp.1970-1973.

    23.        H.Y. Mao, W.G. Wu, Y.L. Zhang, P.P. Lv, C. Qian, and J. Xu, “Silicon Nanopillar-Forest Based Microfluidic Surface-Enhanced Raman Scattering Devices,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2011), Cancun, Mexico, January 23-27, 2011, 968-971.

    24.        Haiyang Mao, Wengang Wu, Qinghai Liu, Yulong Zhang, Yan Li, “Nanofiber-based Surface Microfluidic Structures for Cell and Nanoparticle Patterning,” The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, October 4-7, 2010, 500-502.

    25.        H.Y. Mao, D. Wu, W.G. Wu, J. Xu, H.X. Zhang and Y.L. Hao, “Fabrication of Nanopillars Based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist,” The 22nd IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2009), Sorrento, Italy, January 25-29, 2009, 677-680. (EI收录号20092312105089)

    专利申请:

  • 1.        毛海央、吴文刚、吴迪、郝一龙、王阳元,一种纳米柱森林的加工方法,授权专利号:ZL 200910080158,授权日:2011-01-12。

    2.        毛海央、吴文刚、张煜龙、郝一龙、王阳元,一种多样性纳米结构的加工方法,授权专利号:ZL 200910083938, 申请日:2009-05-11,授权日, 2012-01-18.

    3.        毛海央、吴文刚、张煜龙、黄如、郝一龙、王阳元,一种基于表面增强拉曼散射活性基底的微流控检测器件,授权专利号:ZL 201010117672,授权日:2012-05-30。

    4.        吴文刚、毛海央、吕芃芃,微流控表面增强拉曼散射检测器件及其制备方法与应用,授权专利号:2011101310321.1,申请日期:2011-5-19,公告日:2012-11-21,授权日:2015-08-19.

    5.        毛海央、陈媛婧、欧文,一种纳米柱针森林结构的加工方法,授权专利号:201210265870.2,申请日期:2012-7-30,公告日:2012.11.14,授权日:2014.11.05

    6.        毛海央、陈媛婧、欧文、明安杰,一种高性能MEMS热电堆红外探测器结构及其制备方法,授权专利号:ZL 201210303727.8,申请日期:2012.08.23,公告日:2012.11.28,授权日:2014.02.19

    7.        毛海央、陈媛婧、欧文、明安杰,基于黒硅的高性能MEMS热电堆红外探测器及其制备方法,授权专利号:201210303746.0,申请日期:2012-8-23,公告日:2012.12.19,授权日:2014.04.16

    8.        毛海央、欧文、欧毅、陈大鹏,微纳尺度材料赛贝克系数的测量机构及其制备方法,授权专利号:201310002129.1, 申请日期:2013-1-5,公告日: 2013.04.17,授权日:2014.09.24

    9.        毛海央、欧文、欧毅、陈大鹏,微纳尺度材料赛贝克系数测量机构的制备方法,授权专利号:201310002846.4,申请日期:2013-1-5,公告日: 2013.04.17, 授权日:2015.03.18

    10.        毛海央、欧文、吴文刚、欧毅,高性能MEMS热电堆红外探测器结构及其制备方法,授权专利号:201310067012.1,申请日期:2013-3-1,公告日: 2013.07.17, 授权日:2015.02.11

    11.        毛海央、吴文刚、欧文、欧毅,一种PM2.5过滤结构及其制备方法,授权专利号:201310066827.8,申请日期:2013-3-1,公告日: 2013.07.17,授权日:2014.09.03

    12.        毛海央、欧文,制热型MEMS热电堆红外探测器结构及其制备方法,授权专利号:201310183551.1,申请日期:2013-5-16,公告日:2013.08.14,授权日:2015-06-10

    13.        毛海央、欧文,厨房余热收集装置,授权专利号:201320281936.7,申请日:2013-05-21,授权日:2013.10.30

    14.        毛海央,一种微凹面镜的制备方法,授权专利号:201310308263.4,申请日期:2013-7-22,公告日: 2013.11.20,授权日:2016-01-06

    15.        毛海央、谌灼杰、欧文、吴文刚,PM2.5检测装置及其制造方法,授权专利号:201310400323.5,申请日期:2013-9-5,公告日: 2013.12.18,授权日:2015-09-23

    16.        毛海央、胡建东、陈媛婧、王玲、欧文,基于红外气体传感器的水果成熟度检测系统,中国发明专利,授权专利号:201310544528.0,申请日期:2013-11-5,公告日: 2014.2.12,授权日:2015-08-26

    17.        毛海央、陈媛婧、谌灼杰、欧文、陈大鹏,一种MEMS湿度传感器及制备方法,授权专利号:201310674068.3,申请日期:2013-12-10,公告日: 2013.12.18,授权日期:2016-02-10.

    18.        吴文刚、谌灼杰、毛海央,一种细颗粒物过滤结构及其制备方法,授权专利号:201310717668.3,申请日期:2013-12-23,公告日:2014-03-26,授权日期:2016-02-10

    19.        毛海央、雷程、陈媛婧、欧文、陈大鹏,食用油检测装置和方法,授权专利号:201410193861.6,申请日期:2014.05.08,公开日期:2014-07-23,授权日期:2017-09-29

    20.        毛海央、雷程、陈媛婧、欧文、陈大鹏,气体检测装置及系统和气体检测方法,授权专利号:201410234613.1 ,申请日期:2014.05.29,公开日期:2014-08-27,授权日期:2016-09-07

    21.        毛海央、王岩、唐力程、雷程、欧文,纳米柱/针森林结构的图形化加工方法,授权专利号:201410609901.0,申请日期:2014.11.03,授权日期:2015.08.12.

    22.        毛海央、唐力程,一种纳米结构及其制备方法,授权专利号:201510338283.5,申请日期:2015-06-17,公开日期:2015-11-25,授权日期:2017.07.04.

    23.        毛海央, 一种内嵌式纳米森林结构及其制备方法, 授权专利号:201510808468.8,申请日期:2015-11-17,授权日期:2018.01.09.

    24.        赵柱、毛海央,SERS活性液滴、制备方法及分子检测方法,申请号:2017011800209830,申请日期:2017-01-16

    25.        赵柱、毛海央,一种红外吸收结构及其与红外传感器件的集成方法,申请号:201710032686.6,申请日期:2017-01-16

    26.        毛海央、杨宇东,黑硅、制备工艺及基于黑硅的MEMS器件制备方法,申请号:201710871041.1 ,申请日期:2017-09-22

    27.        杨宇东、毛海央,MEMS光学器件、光吸收纳米结构及其制备方法,申请号:201711218812.3,申请日期:2017-11-28

    28.        毛海央、李锐锐、杨宇东,一种微流道结构及其制备方法,申请号:201710750856.4,申请日期:2017-12-22

    29.        毛海央、李锐锐、陈贵东,SERS活性基底及其制备方法以及痕量被测试剂分子富集方法,申请号:201811120124.8,申请日:2018-09-25

    30.        刘洋、毛海央、杨宇东、黄成军,一种可扩展倍比稀释微流控芯片、制备方法和稀释方法,申请号:201811480673.6,申请日:2018-12-05

    31.        李锐锐、毛海央、张琛琛,表面增强拉曼散射基底、制备方法及3D富集与检测方法,申请号:201910107266.9,申请日:2019-2-02

    32.        杨宇东、毛海央,纳米森林结构的制备方法及纳米森林结构的调控方法,申请号:201910304292.0,申请日期:2019-04-16

    33.        毛海央、欧文,基于黑硅的高性能MEMS热电堆红外探测器及其制备方法,PCT申请号:PCT/CN2013/000065,专利号:US9222837B2,授权日 2015年12月29日。

    34.        毛海央、欧文,一种高性能MEMS热电堆红外探测器结构及其制备方法,PCT申请号:PCT/CN2013/000064,专利号:US9117949B2,授权日 2015年8月25日。

    获奖及荣誉:

  • 2019.01 获澳门皇家赌场55533网址“学生最喜爱的导师”称号

    2018.10 获中国科学院澳门皇家赌场55533网址“第二届科普创新大赛二等奖”

    2017.10 入选中国科学院青年创新促进会会员;

    2016.07 皇家赌场网址hj9990“优秀共产党员”;

    2015.01 中国科学院微电子器件与集成技术重点实验室“年度先进工作者”;

    2015.01 江苏物联网研究发展中心“年度先进工作者”。

    2014.09 皇家赌场网址hj9990“寻找科研新星”优秀奖;

    2014.01 皇家赌场网址hj9990“年度十佳先进工作者”;

    2014.01 中国科学院微电子器件与集成技术重点实验室“年度先进工作者”;

    2014.01 江苏物联网研究发展中心“年度先进工作者”。