• 姓名: 谢常青
  • 性别: 男
  • 职称: 研究员
  • 职务: 副主任
  • 学历: 本科
  • 电话: 010-82995581
  • 传真: 010-82995581
  • 电子邮件: xiechangqing@ime.ac.cn
  • 所属部门: 微电子器件与集成技术重点实验室
  • 通讯地址: 北京市朝阳区北土城西路3号

    简  历:

    社会任职:

    研究方向:

  • 先进的纳米光刻技术研究(包括深紫外激光直写、电子束光刻、X射线光刻、193nm光学光刻等); 纳米尺度深紫外、X射线衍射光学元件的设计、制造、检测及应用研究,近年来主持研究成功十多种5000线/mm、10000线/mm衍射光学元件并获得成功应用。

    承担科研项目情况:

  • 承担过包括“863”、“973”、国家科技攻关在内的10多项科研项目,曾为国内50多家科研单位、公司提供过微纳加工技术服务。

    正在进行的研究项目:

    1、纳米尺度X射线光学元件设计、制作及应用,2007-2012,973项目子课题;

    2、低应力自支撑SiC薄膜生长的10000C高真空等离子体沉积设备,2007-2009,中国科学院重大科研装备研制项目;

    代表论著:

  • 1、 Nan Gao and Changqing Xie*. Parabolic scaling beams. Opt.Lett.39(12): 3619-3622(2014).

    2、 Changqing Xie, Xiaoli Zhu, Hailiang Li, Jiebin Niu, Nan Gao, Yilei Hua, Lina Shi, and Ming Liu. Hybrid lithography for x-ray diffractive optical elements. 22 April 2014, SPIE Newsroom. DOI: 10.1117/2.1201404.005456

    3、 Changqing Xie,Xiaoli Zhu,Hailiang Li,Jiebin Niu,Yilei Hua and Lina Shi. Fabrication of x-ray diffractive optical elements for laser fusion applications. Opt. Eng.,52(3),033402(2013).

    4、 Yuchao Zhang and Changqing Xie*. Controlled interaction of the optical vortices generated by off-center spiral zone plates. Opt.Commun. 311:65-71(2013).

    5、 Shaolin Zhou,Changqing Xie*,Yong Yang, Song Hu, Xiangmin Xu, and Jun Yang.Moiré-based phase imaging for sensing and adjustment of in-plane twist angle. IEEE Photon. Technol. Lett . 25 (18):1847-1850 (2013).

    6、 Nan Gao, Hailiang Li, Xiaoli Zhu, Yilei Hua, and Changqing Xie*. Quasi-periodic gratings: diffraction orders accelerate along curves. Opt.Lett.38(15):2829-2831(2013).

    7、 Lina Shi, Hailiang Li, Yuchan Du, and Changqing Xie*. Enhanced optical transmission through asymmetric nanostructured gold films. J.Opt.Soc.Am. B. 29(12):3377-3385(2012).

    8、 Changqing Xie,Xiaoli Zhu,Hailiang Li,Lina Shi,Yilei Hua and Ming Liu. Toward two-dimensional nanometer resolution hard-x-ray differential-interference-contrast imaging using modified photon sieves. Opt.Lett.37(4):749-751(2012).

    9、 Nan Gao and Changqing Xie*.Experimental demonstration of free-space optical vortex transmutation with polygonal lenses. Opt.Lett.37(15):3255-3257(2012).

    10、 Yuchao Zhang, Nan Gao and Changqing Xie*. Using Circular Dammann Gratings to produce impulse optic vortex rings. Appl.Phys.Lett. 100, 041107(2012).

    11、 Nan Gao, Changqing Xie*, Chun Li, Chunshui Jin, and Ming Liu. Square optical vortices generated by binaray spiral zone plates. Appl.Phys.Lett. 98, 151106(2011).

    12、 Nan Gao, Changqing Xie*. High-order diffraction suppression using modulated groove position gratings.Opt.Lett.36(21):4251-4253(2011).

    13、 Nan Gao,Yuchao Zhang,and Changqing Xie*.Circular Fibonacci gratings.Appl.Opt. 50(31):G142-G148(2011).

    14、 谢常青,朱效立,牛洁斌,李海亮,刘明,陈宝钦,胡媛,史丽娜. 微纳金属光学结构制备技术及应用[J]. 光学学报, 2011, 31(9): 0900128.

    15、 Changqing Xie, Xiaoli Zhu, Hailiang Li, Lina Shi,and Yanhua Wang. Feasibility study of hard-x-ray nanofocusing above 20keV using compound photon sieves. Opt.Lett. 35(23):4048-4050(2010).

    16、 Changqing Xie, Xiaoli Zhu, Lina Shi, and Ming Liu. Spiral photon sieves apodized by digital prolate spheroidal window for the generation of hard-x-ray vortex. Opt.Lett. 35(11):1765-1767(2010).

    17、 Changqing Xie, Xiaoli Zhu, and Jia Jia.Focusing properties of hard x-ray photon sieves: three-parameter apodization window and waveguide effect. Opt.Lett. 34(19):3038-3040(2009).

    专利申请:

    获奖及荣誉:

  • 在2003年和2006年分别获得北京市科学技术进步一等奖